Understanding Dissipation in Nanostring Resonant Sensors
نویسندگان
چکیده
We have used optical drive and detection to study dissipation in silicon nitride beam resonators. We are able to tune resonant frequency as well as quality factor in a given nanostring resonator by several hundred percent by tuning the stress in real time, providing a unique look into the sources of dissipation for this class of nanoresonator. A record room temperature quality factor of 390,000 at 3.7 MHz has been attained in vacuum with a silicon nitride nanostring under tension. Nanostrings have also been resonated in viscous liquids including water and biological buffer. This is the first demonstration of the operation of truly nanoscale flexural resonators in viscous liquids.
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